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Keep Smiling

Fundamentals of semiconductor fabrication / Gary S. May

By: Contributor(s): Material type: TextTextPublication details: John Wiley & Sons, New Jersey : 2004Description: xiii, 305 pISBN:
  • 981253072x (pbk)
Subject(s): DDC classification:
  • 621.38152 M4514
Contents:
1. Introduction 2. Crystal Growth 3. Silicon oxidation 4. Photolithography 5. Etching 6. Diffusion 7. Ion implantation 8. Film deposition 9. Process integration 10. IC manufacturing 11. Future trends and challenges
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Item type Current library Call number Status Date due Barcode
Books Books UE-Central Library 621.38152 M4514 (Browse shelf(Opens below)) Available T285

IncludesAppendices and index

1. Introduction
2. Crystal Growth
3. Silicon oxidation
4. Photolithography
5. Etching
6. Diffusion
7. Ion implantation
8. Film deposition
9. Process integration
10. IC manufacturing
11. Future trends and challenges

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