Fundamentals of semiconductor fabrication (Record no. 2135)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00819nam a2200217Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 285 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20201023093626.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180716s9999||||xx |||||||||||||| ||und|| |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 981253072x (pbk) |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | PK-IsLIS |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | M4514 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | May, Gary S. |
| 245 #0 - TITLE STATEMENT | |
| Title | Fundamentals of semiconductor fabrication |
| Statement of responsibility, etc | / Gary S. May |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher, distributor, etc | John Wiley & Sons, |
| Place of publication, distribution, etc | New Jersey : |
| Date of publication, distribution, etc | 2004 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 305 p. |
| 500 ## - GENERAL NOTE | |
| General note | IncludesAppendices and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Applied Physics-Technology |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Simon M. Sze |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 1. Introduction <br/>2. Crystal Growth <br/>3. Silicon oxidation <br/>4. Photolithography <br/>5. Etching <br/>6. Diffusion<br/>7. Ion implantation <br/>8. Film deposition <br/>9. Process integration <br/>10. IC manufacturing <br/>11. Future trends and challenges <br/><br/> |
| Withdrawn status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| UE-Central Library | UE-Central Library | 16.07.2018 | 621.38152 M4514 | T285 | 16.07.2018 | 16.07.2018 | Books |
