Chemical vapour deposition : precursors, processes and applications (Record no. 21732)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01093nam a22001697a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220830132235.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 220830b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780854044658 (hbk) |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | UE-CL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 671.735 |
| Item number | C42012 |
| 245 ## - TITLE STATEMENT | |
| Title | Chemical vapour deposition : precursors, processes and applications |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | UK : |
| Name of publisher, distributor, etc | RSC, |
| Date of publication, distribution, etc | 2009 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 582 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Chemical vapor deposition--Chemistry--Vapor-plating |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 1. Overview of chemical vapour deposition <br/>2. CVD reactors and delivery system technology <br/>3. Modeling CVD processes<br/>4. Atomic layer deposition<br/>5. Basic chemistry of CVD and ALD precursors <br/>6. CVD of III-V compound semiconductors <br/>7. Chemical vapor deposition of metals: W, AI, Cu and Ru<br/>8. Chemical vapour deposition of metal oxides for microelectronics applications <br/>9. Metal organic chemical vapour deposition of refractory transition metal nitrides <br/>10. CVD of functional coatings on glass <br/>11. Photo assisted CVD <br/>12. Plasma enhanced chemical vapour deposition processes<br/>13. Commercial aspects of CVD <br/> |
| Withdrawn status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| UE-Central Library | UE-Central Library | 30.08.2022 | 671.735 C42012 | T16817 | 30.08.2022 | 30.08.2022 | Books | |||
| UE-Central Library | UE-Central Library | 30.08.2022 | 671.735 C42012 | T16818 | 30.08.2022 | 30.08.2022 | Books |
