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Study of structural and morphological properties of tungsten nitride thin film prepared using plasma focus device (Record no. 21823)

MARC details
000 -LEADER
fixed length control field 01548nam a22001697a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20221005185714.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 221005b ||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number hbk
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 537.5
Item number St9468
100 ## - MAIN ENTRY--PERSONAL NAME
Student name Shriyar Tariq,
Class MS Physics,
Session 2016-2018
Supervisor Supervised by Dr. Ali Hussnain
245 ## - TITLE STATEMENT
Title Study of structural and morphological properties of tungsten nitride thin film prepared using plasma focus device
Statement of responsibility, etc / Shriyar Tariq
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Lahore :
Name of publisher, distributor, etc Division of Science & Technology, University of Education,
Date of publication, distribution, etc 2018
300 ## - PHYSICAL DESCRIPTION
Extent xi, 85 p.
Accompanying material CD
520 ## - SUMMARY, ETC.
Summary, etc The significance of this research is to perfect the technique of producing fine tungsten<br/>Nano film on silicon substrate. That will be used as diffusion barriers in integrated<br/>circuits capable of handling higher temperature without intermixing of Si and Cu. This<br/>will greatly enhance the life and working temperature range of IC’s. Nano films of<br/>tungsten nitride are formed using a Mather type dense plasma focus device on the silicon<br/>substrate and varied number of shots. Different number of shots i.e. 10, 20, 30 and 40 are<br/>employed and the effect of this variation in number of shots on crystalline arrangement<br/>and crystalline shape is studied. The XRD data of the irradiated substrate indicated the<br/>presence of different phases of WN and WN2, the number of shots determine that which<br/>phase will be dominant. The SEM micrographs revealed a uniform distribution of grains<br/>all over the substrate.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Physics--Morphological Properties--Thin Film
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Theses
Holdings
Withdrawn status Damaged status Home library Current library Date acquired Full call number Barcode Date last seen Price effective from Koha item type
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