TY  - BOOK
AU  - Ohring, Milton
TI  - Materials science of thin films
SN  - 9780125249751
U1  - 621.38152 
PY  - 2002///
CY  - New York
PB  - Academic Press
KW  - Thin films
N1  - Includes bibliographical references and index; Foreword to first edition preface acknowledgments a historical perspective chapter 1 a review of materials science  1.1. Introduction 1.2. Structure 1.3. Defects in solids  1.4. Bonds and bands in materials  1.5. Thermodynamics of materials  1.6. Kinetics
ER  -